Japan, June 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-155947
Category (FI): H10P50/20,101@G,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 29, 2022
Publication Date: April 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....