Japan, March 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-046649
Category (FI): H01L21/304,643@A,H01L21/306@R,H10P50/60@R,H10P70/00,103@A
Stage: Grant (IP right document published.)
Filing Date: March 23, 2022
Publication Date: Oct. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....