Japan, Feb. 12 -- BROOKS AUTOMATION US LLC has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-116116
Category (FI): H01L21/68@A,H02P25/064,H10P72/30@A,B65G49/07@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 19, 2024
Publication Date: Oct. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....