Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-094826
Category (FI): B65G49/07@E,H01L21/304,648@B,H01L21/304,648@H,H01L21/68@A,H10P70/00,108@B,H10P70/00,108@H,H10P70/00,201@N,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: June 8, 2023
Publication Date: Dec. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....