Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-116065
Category (FI): H10P70/00,201@H,H10P70/00,201@J,H01L21/304,651@G,H01L21/304,651@H,H01L21/304,651@J,H10P70/00,201@G
Stage: Grant (IP right document published.)
Filing Date: July 14, 2021
Publication Date: Jan. 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....