Japan, Nov. 12 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-186719
Category (FI): G03F7/42,H01L21/30,572@B,H01L21/304,643@A,H01L21/304,647@Z,H10P70/00,103@A,H10P70/00,107@Z,H10P76/00,572@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 22, 2022
Publication Date: June 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....