Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Nov. 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2021-079449

Category (FI): H10P70/00,107@A,H01L21/304,651@Z,H01L21/304,642@A,H01L21/304,648@A,H01L21/304,647@A,H01L21/304,648@G,H01L21/304,651@B,H10P70/00,102@A,H10P70/00,108@A,H10P70/00,108@G,H10P70/00,201@B,H10P70/00,201@N,H10P70/00,201@Z

Stage: Grant (IP right document published.)

Filing Date: May 10, 2021

Publication Date: Nov. 22, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....