Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Sept. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-152228

Category (FI): H10P70/00,201@B,H10P70/00,108@G,H10P70/00,108@A,H10P70/00,104@C,H10P70/00,104@B,H01L21/68@A,H01L21/304,651@B,H01L21/304,648@G,H01L21/304,644@B,H01L21/304,644@C,H01L21/304,648@A,H10P72/30@A

Stage: PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method capable of suppressing the occurrence of substrate processing defects caused by positional misalignment.SOLUTION: A substrate cleaning apparatus 1 includes a chamber, a first processing portion, and a second proces...