Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Sept. 14 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-185472

Category (FI): H10P70/00,102@A,H01L21/306@A,H01L21/304,648@A,H01L21/304,648@F,H01L21/304,648@G,H10P70/00,201@L,H01L21/304,647@A,H01L21/304,647@Z,H01L21/304,651@L,H10P50/60@A,H10P50/60@J,H01L21/304,642@A,H10P70/00,107@A,H10P70/00,107@Z,H10P70/00,108@A,H10P70/00,108@F,H10P70/00,108@G,H01L21/306@J

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 21, 2022

Publication Date: May 31, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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