Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Sept. 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-045651

Category (FI): H10P70/00,108@G,H01L21/304,651@J,H10P70/00,201@G,H10P70/00,201@J,H01L21/304,651@G,H01L21/304,648@G,H01L21/304,647@A,H10P70/00,107@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 22, 2023

Publication Date: Oct. 4, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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