Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, July 1 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-022628

Category (FI): H01L21/304,643@A,H01L21/306@R,H01L21/304,648@F,H10P50/60@R,H10P70/00,103@A,H10P70/00,108@F,H10P70/00,108@K,H01L21/304,648@K

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 16, 2023

Publication Date: Aug. 28, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....