Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-046825

Category (FI): H01L21/304,648@G,H01L21/304,648@A,H10P70/00,108@A,H10P70/00,201@L,H10P70/00,201@N,H01L21/304,651@Z,H01L21/304,651@L,H10P70/00,201@Z,H10P70/00,108@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 23, 2022

Publication Date: Oct. 5, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....