Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2024-216872

Category (FI): H01L21/304,648@G,H01L21/304,648@K,H01L21/304,651@Z,H10P70/00,108@G,H10P70/00,108@K,H10P70/00,201@N,H10P70/00,201@Z

Stage: Grant (IP right document published.)

Filing Date: Dec. 11, 2024

Publication Date: Feb. 21, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....