Japan, Oct. 29 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-062515

Category (FI): H01L21/304,648@H,H01L21/304,648@K

Stage: Grant(IP right document published.)

Filing Date: April 4, 2022

Publication Date: Oct. 17, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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