Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD IN SUBSTRATE PROCESSING APPARATUS

Japan, Sept. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD IN SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-105016

Category (FI): G06T7/70@Z,G01B11/24@K,H01L21/68@N,H10P72/70

Stage: PROBLEM TO BE SOLVED: To efficiently recognize the attitude of a component with respect to a substrate processing apparatus.SOLUTION: Based upon design information on an object component, reference shape information associated with a two-dimensional shape of a 3D model for each of a plurality of first virtual camera positions on a plurality of virtual planes along a virtual spherical surface enclosing the 3D model for ...