Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND STORAGE MEDIUM

Japan, July 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND STORAGE MEDIUM.' Other related details are as follows:

Application Number: JP,2024-177697

Category (FI): B05C11/00,B05C5/00,101,H01L21/30,564,H01L21/30,577,H10P76/00,564,H10P76/00,577

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 10, 2024

Publication Date: Jan. 23, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....