Japan, Oct. 29 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-103495

Category (FI): H01L21/68@A

Stage: Grant(IP right document published.)

Filing Date: June 28, 2022

Publication Date: Jan. 16, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....