Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-043800

Category (FI): H01L21/302,101@G,H01L21/68@N

Stage: Grant (IP right document published.)

Filing Date: March 18, 2022

Publication Date: Sept. 29, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....