Japan Intellectual Property Rights: SUBSTRATE-HOLDING DEVICE, LITHOGRAPHY APPARATUS, SUBSTRATE-HOLDING METHOD, AND PRODUCTION METHOD OF ARTICLE

Japan, Jan. 19 -- CANON INC has got intellectual property rights for 'SUBSTRATE-HOLDING DEVICE, LITHOGRAPHY APPARATUS, SUBSTRATE-HOLDING METHOD, AND PRODUCTION METHOD OF ARTICLE.' Other related details are as follows:

Application Number: JP,2021-190486

Category (FI): G03F7/20,501,G03F7/20,521,H01L21/68@P,H10P72/78

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 24, 2021

Publication Date: June 5, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....