Japan, July 31 -- ASML NETHERLANDS BV has got intellectual property rights for 'SUBSTRATE HOLDER FOR USE IN LITHOGRAPHY DEVICE.' Other related details are as follows:
Application Number: JP,2024-229672
Category (FI): G03F7/20,501,H10P72/78,H01L21/68@P,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 26, 2024
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....