Japan, March 25 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-045264

Category (FI): H10P70/00,201@B,H01L21/304,651@M,H01L21/304,647@A,H01L21/304,651@B,H10P70/00,107@A,H10P70/00,201@M

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 22, 2022

Publication Date: Oct. 4, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....