Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE CONVEYING DEVICE AND SUBSTRATE CONVEYING METHOD.' Other related details are as follows:
Application Number: JP,2021-204532
Category (FI): H01L21/30,562,H01L21/68@A
Stage: Grant (IP right document published.)
Filing Date: Dec. 16, 2021
Publication Date: June 28, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....