Japan, Jan. 28 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD AND SUBSTRATE POLISHING DEVICE.' Other related details are as follows:

Application Number: JP,2021-134075

Category (FI): H01L21/304,622@Q,H01L21/304,643@A,H01L21/304,644@C,H01L21/304,648@G,H10P52/00@T,H10P52/40,H10P70/00,103@A,H10P70/00,104@C,H10P70/00,108@G

Stage: Grant (IP right document published.)

Filing Date: Aug. 19, 2021

Publication Date: March 3, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....