Japan, Jan. 28 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND ROLL SPONGE FOR SUBSTRATE CLEANING APPARATUS.' Other related details are as follows:

Application Number: JP,2024-161645

Category (FI): H01L21/304,644@G,H10P70/00,104@G

Stage: Grant (IP right document published.)

Filing Date: Sept. 19, 2024

Publication Date: Dec. 5, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....