Japan Intellectual Property Rights: SOLID SUBSTRATE, MANUFACTURING METHOD FOR THE SAME, AND MANUFACTURING METHOD FOR SOLID STATE DEVICE

Japan, Jan. 23 -- NATIONAL INSTITUTE FOR MATERIALS SCIENCE has got intellectual property rights for 'SOLID SUBSTRATE, MANUFACTURING METHOD FOR THE SAME, AND MANUFACTURING METHOD FOR SOLID STATE DEVICE.' Other related details are as follows:

Application Number: JP,2022-113575

Category (FI): C23C14/06@F,H01L21/265,602@A,H01L21/324@X,H01L29/78,301@B,H01L29/78,301@V,H01L29/78,652@T,H01L29/78,653@A,H01L29/78,658@E,H10D30/01,301@E,H10D30/60@B,H10D30/60@V,H10D30/63,H10D30/66,101@T,H10D30/66,201@A,H10P30/28@H,H10P95/90,101@X

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 15, 2022

Publication Date: Jan. 25, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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