Japan, Feb. 12 -- TOHOKU UNIV has got intellectual property rights for 'SOFT X-RAY MULTILAYER FILM DIFFRACTION GRATING.' Other related details are as follows:
Application Number: JP,2022-017374
Category (FI): G21K1/06@B,G02B5/18
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 7, 2022
Publication Date: Aug. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....