Japan, Aug. 6 -- KANTO CHEM CO INC has got intellectual property rights for 'SILICON NITRIDE ETCHANT COMPOSITION.' Other related details are as follows:
Application Number: JP,2022-079909
Category (FI): H10D30/69,H10D30/68,H10D30/01,501,H10B41/27,H01L29/78,371,H10B43/27,H01L27/11556,H01L27/11582,H01L21/306@E,H01L21/308@E,H10P50/68@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 16, 2022
Publication Date: Nov. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....