Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SHOWER HEAD, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-090300

Category (FI): C23C16/455,H10P50/28,H10P50/20,101@H,H10P14/60,101@F,H01L21/31@F,H01L21/302,101@H

Stage: Grant (IP right granted following substantive examination.)

Filing Date: May 31, 2023

Publication Date: Dec. 12, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....