Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2024-068499
Category (FI): H01L21/302,101@G,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: April 19, 2024
Publication Date: July 17, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....