Japan, Sept. 3 -- TOKYO SEIMITSU CO LTD,KELK LTD has got intellectual property rights for 'SEMICONDUCTOR WAFER TEMPERATURE CONTROL DEVICE AND SEMICONDUCTOR WAFER TEMPERATURE CONTROL METHOD.' Other related details are as follows:

Application Number: JP,2021-023417

Category (FI): H01L21/02@Z,G05B13/02@J,G05B11/36@K,H01L21/66@B,H10P74/00@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 17, 2021

Publication Date: Aug. 29, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....