Japan, June 16 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'SEMICONDUCTOR OBSERVATION SYSTEM AND OVERLAY MEASUREMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-153123
Category (FI): H10P74/20@J,G01B15/00@K,H01L21/66@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 26, 2022
Publication Date: April 5, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....