Japan Intellectual Property Rights: SEMICONDUCTOR MANUFACTURING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR

Japan, Sept. 14 -- TOSHIBA CORP has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR.' Other related details are as follows:

Application Number: JP,2022-102735

Category (FI): H01L21/30,572@B,H01L21/304,647@Z,H01L21/304,651@H,H01L21/304,651@L,H01L21/304,651@M,H10P70/00,107@Z,H10P70/00,201@H,H10P70/00,201@L,H10P70/00,201@M,H10P76/00,572@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 27, 2022

Publication Date: Jan. 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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