Japan, Feb. 18 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'SCANNING-TYPE REDUCED PROJECTION OPTICAL SYSTEM.' Other related details are as follows:
Application Number: JP,2022-096264
Category (FI): B23K26/351,G02B26/10,104@Z,G02B27/18@A,G02B3/00@A,G03F7/20,505
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 15, 2022
Publication Date: Feb. 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....