Japan, Feb. 27 -- DOCUMETARY CHANNEL CO LTD has got intellectual property rights for 'SAMPLE COOLING DEVICE FOR SCANNING ELECTRON MICROSCOPE.' Other related details are as follows:
Application Number: JP,2023-103080
Category (FI): H01J37/28@B,H01J37/20@D,H01J37/20@E
Stage: PROBLEM TO BE SOLVED: To provide a sample cooling device for a scanning electron microscope, capable of preventing a fine oscillation of a sample as well as suppressing a temperature increase of the sample.SOLUTION: A sample cooling device 1 comprises: a chamber 3 defining a sealed space 2 in an internal part; a vacuum pump 4 that makes the sealed space 2 in this chamber 3 into a vacuum state; a sample stage 7 that can be arranged at an irradiation place of an electron...