Japan, Jan. 28 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RF PULSE WITHIN PULSE FOR SEMICONDUCTOR RF PLASMA PROCESSING.' Other related details are as follows:
Application Number: JP,2024-106537
Category (FI): H05H1/46@R,H01L21/302,101@C,H10P50/20,101@C,H10P50/24
Stage: Grant (IP right document published.)
Filing Date: July 2, 2024
Publication Date: Oct. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....