Japan, Jan. 28 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RF IMMUNOSENSOR PROBE FOR MONITORING TEMPERATURE OF ELECTROSTATIC CHUCK IN SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2025-005966
Category (FI): G01K1/14@L,H01L21/302,101@G,H01L21/68@R,H05H1/46@L,H05H1/46@M,H10P50/20,101@G,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: Jan. 16, 2025
Publication Date: April 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....