Japan, Sept. 3 -- ENTEGRIS INC has got intellectual property rights for 'RETICLE POD WITH COATED SENSOR ZONE.' Other related details are as follows:
Application Number: JP,2024-225876
Category (FI): H01L21/68@T,H10P72/10@T,H10P72/50@F,H01L21/68@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 23, 2024
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....