Japan, Jan. 28 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'RESIST UNDERLAYER FILM FORMING COMPOSITION, PATTERN FORMING METHOD, AND RESIST UNDERLAYER FILM FORMING METHOD.' Other related details are as follows:
Application Number: JP,2023-001687
Category (FI): H01L21/30,573,C08K5/06,C08K5/053,C08L65/00,G03F7/039,601,G03F7/11,503,G03F7/11,502,H10P76/00,573
Stage: Grant (IP right document published.)
Filing Date: Jan. 10, 2023
Publication Date: July 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....