Japan, July 31 -- APPLIED MATERIALS INC has got intellectual property rights for 'RESIDUE REMOVAL.' Other related details are as follows:
Application Number: JP,2023-098228
Category (FI): H10P70/00,105@C,H10P70/00,104@C,H10P52/00@E,H10P52/00@T,H10P52/40,H10P50/28,H10P50/20,102,H01L21/304,644@C,H01L21/304,621@D,H01L21/304,645@C,H01L21/302,102
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 15, 2023
Publication Date: Sept. 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....