Japan, March 24 -- AIR LIQUIDE JAPAN GK has got intellectual property rights for 'RESIDUAL QUANTITY MEASURING METHOD OF SOLID MATERIAL, SUBLIMATION GAS SUPPLY METHOD AND SUBLIMATION GAS SUPPLY SYSTEM.' Other related details are as follows:

Application Number: JP,2022-008099

Category (FI): B01J4/00,102,B01J7/00@Z,C23C16/448,H01L21/205,H10P14/24

Stage: Grant (IP right document published.)

Filing Date: Jan. 21, 2022

Publication Date: Aug. 2, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....