Japan, Sept. 28 -- AGC INC has got intellectual property rights for 'REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD FOR PRODUCING REFLECTIVE MASK BLANK, AND METHOD FOR PRODUCING REFLECTIVE MASK.' Other related details are as follows:
Application Number: JP,2023-045100
Category (FI): G03F1/24,G03F1/54,C23C14/06@N,G03F1/32
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 22, 2023
Publication Date: Oct. 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....