Japan, March 27 -- AGC INC has got intellectual property rights for 'REFLECTION TYPE MASK BLANK, REFLECTION TYPE MASK, AND METHOD FOR MANUFACTURING REFLECTION TYPE MASK.' Other related details are as follows:
Application Number: JP,2022-113411
Category (FI): C23C14/06@R,G03F1/24
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 14, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....