Japan, Jan. 19 -- TOKYO ELECTRON LTD has got intellectual property rights for 'RAW MATERIAL FEEDING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND RESIDUAL QUANTITY ESTIMATION METHOD.' Other related details are as follows:
Application Number: JP,2021-147147
Category (FI): B01J4/00,102,C23C16/448,C23C16/52,H01L21/205,H01L21/31@B,H10P14/60,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 9, 2021
Publication Date: March 22, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....