Japan Intellectual Property Rights: PROCESSING LIQUID SUPPLY METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 20 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'PROCESSING LIQUID SUPPLY METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-019693

Category (FI): H01L21/304,648@K,H01L21/304,648@G,H10P70/00,103@A,H10P70/00,108@G,H10P70/00,108@K,H10P76/00,569,H10P76/00,564,H01L21/30,569,H01L21/30,564,H01L21/304,643@A

Stage: Grant (IP right document published.)

Filing Date: Feb. 10, 2022

Publication Date: Aug. 23, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....