Japan, May 13 -- APPLIED MATERIALS INC has got intellectual property rights for 'PROCESSING CHAMBER WITH SUBSTRATE EDGE ENHANCEMENT PROCESSING.' Other related details are as follows:
Application Number: JP,2023-061506
Category (FI): H10P50/20,101@G,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 5, 2023
Publication Date: July 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....