Japan, Nov. 10 -- GLOBALWAFERS JAPAN CO LTD has got intellectual property rights for 'POLISHING PAD, POLISHING DEVICE, AND POLISHING METHOD.' Other related details are as follows:

Application Number: JP,2021-164892

Category (FI): B24B37/32@Z,B24B37/24@C,B24B37/26,B24B37/005@A,B24B37/10,B24B37/30@E,H10P52/00@D,H01L21/304,622@F,H10P52/40

Stage: Grant (IP right document published.)

Filing Date: Oct. 6, 2021

Publication Date: April 18, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....