Japan, Jan. 20 -- EBARA CORP has got intellectual property rights for 'POLISHING METHOD AND POLISHING DEVICE FOR WORK-PIECE.' Other related details are as follows:
Application Number: JP,2022-056134
Category (FI): H10P52/00@E,H01L21/304,622@S,H01L21/304,621@D,B24B55/06,B24B53/017@Z,B24B49/12,B24B37/013,B24B49/04@Z,B24B37/10,H10P52/00@V,H10P52/40,H10P52/00@T
Stage: Grant (IP right document published.)
Filing Date: March 30, 2022
Publication Date: Oct. 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....