Japan, Jan. 28 -- ULVAC JAPAN LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2021-196981
Category (FI): C23C16/455,H01L21/205,H10P14/24
Stage: Grant (IP right document published.)
Filing Date: Dec. 3, 2021
Publication Date: June 15, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....