Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-109300
Category (FI): H01L21/31@C,C23C16/505,C23C16/44@B,H05H1/46@M,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 6, 2022
Publication Date: Jan. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....