Japan, Sept. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-109299
Category (FI): C23C16/44@B,C23C16/505,H05H1/46@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 6, 2022
Publication Date: Jan. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....